Ukubonakaliswa kuthetha ukuba phantsi kwe-irradiation yokukhanya kwe-ultraviolet, i-photoinitiator ithatha amandla okukhanya kwaye ibole ibe yi-radicals yamahhala, kwaye i-radicals yamahhala iqalise i-photopolymerization monomer ukwenza i-polymerization kunye ne-crosslinking reaction. Utyhileko ngokuqhelekileyo luqhutywa kumatshini ozivelelayo onamacala amabini. Ngoku umatshini wokuvezwa unokwahlulwa ube yi-air-cooled and water-cooled ngokwendlela yokupholisa yomthombo wokukhanya.
Izinto ezichaphazela uMgangatho woMfanekiselo wokutyhileka
Ukongeza kwintsebenzo yefilimu ye-photoresist, izinto ezichaphazela umgangatho we-imaging ye-exposure kukukhethwa kwemithombo yokukhanya, ukulawulwa kwexesha lokuvezwa (ixabiso lokuvezwa), kunye nomgangatho weepleyiti zeefoto.
1) Ukukhethwa komthombo wokukhanya
Naluphi na uhlobo lwefilimu lunejiko lalo lokufunxa elikhethekileyo, kwaye naluphi na uhlobo lomthombo wokukhanya lukwanalo ijiko lokuphuma kwembonakalo. Ukuba eyona ndawo iphambili yokufunxa imbonakalo yohlobo oluthile lwefilimu inokugqithelana okanye ubukhulu becala idibane nencopho yokukhutshwa kwembonakalo yomthombo othile wokukhanya, ezi zimbini zihambelana kakuhle kwaye iziphumo zokuvezwa zezona zingcono.
I-spectral absorption curve yefilimu yasekhaya eyomileyo ibonisa ukuba ummandla we-spectral absorption yi-310-440 nm (nanometer). Ukusuka kumandla okukhanya okusasazeka kwemithombo yokukhanya emininzi, kunokubonwa ukuba isibane sokuchola, isibane soxinzelelo oluphezulu lwemercury, kunye nesibane se-iodine gallium sinobungakanani obukhulu bemitha yokukhanya kuluhlu lwamaza angama-310-440nm, olu lumthombo wokukhanya ofanelekileyo ukubonakaliswa kwefilimu. Izibane zeXenon azifanelekangaukungakhuselekiyeefilimu ezomileyo.
Emva kokuba uhlobo lomthombo wokukhanya lukhethiwe, umthombo wokukhanya onegunya eliphezulu kufuneka uphinde uqwalaselwe. Ngenxa yokukhanya okuphezulu kokukhanya, isisombululo esiphezulu, kunye nexesha elifutshane lokuvezwa, iqondo lokuguqulwa kwe-thermal yepleyiti yeefoto nalo lincinci. Ukongeza, ukuyila kwezibane kubaluleke kakhulu. Kuyimfuneko ukuba uzame ukwenza isiganeko silula ngokufanayo kunye nokuhambelana, ukwenzela ukuba ugweme okanye unciphise umphumo ombi emva kokuvezwa.
2) Ukulawulwa kwexesha lokuvezwa (ixabiso lokuvezwa)
Ngethuba lenkqubo yokuvezwa, i-photopolymerization yefilimu ayikho "i-shot-one" okanye "i-exposure-one", kodwa ngokubanzi ihamba ngezigaba ezintathu.
Ngenxa yokuphazamiseka kwe-oksijeni okanye ezinye izinto ezingcolileyo kwi-membrane, inkqubo yokungeniswa iyadingeka, apho i-radicals yamahhala eyenziwa ngokuchithwa komqalisi idliwe yi-oksijeni kunye nokungcola, kwaye i-polymerization ye-monomer incinci. Nangona kunjalo, xa ixesha lokungeniswa liphelile, i-photopolymerization ye-monomer ihamba ngokukhawuleza, kwaye i-viscosity yefilimu yanda ngokukhawuleza, isondela kwinqanaba lokutshintsha ngokukhawuleza. Eli linqanaba lokusetyenziswa ngokukhawuleza kwe-photosensitive monomer, kwaye eli nqanaba libalela uninzi lokuvezwa ngexesha lenkqubo yokuvezwa. Isikali sexesha sincinci kakhulu. Xa ininzi ye-photosensitive monomer idliwe, ingena kwi-monomer zone depletion zone, kwaye i-photopolymerization reaction igqityiwe ngeli xesha.
Ulawulo oluchanekileyo lwexesha lokuvezwa luyinto ebaluleke kakhulu ekufumaneni imifanekiso yokumelana nefilimu eyomileyo. Xa i-exposure ayinelanga, ngenxa ye-polymerization engaphelelanga ye-monomers, ngexesha lenkqubo yophuhliso, ifilimu yokuncamathela iyadumba kwaye ithambile, imigca ayicacanga, umbala umnyama, kwaye ude udikwe, kwaye ifilimu iwarps ngexesha langaphambili. -Plating okanye electroplating inkqubo. , ukuvuza, okanye ukuwa. Xa i-exposure iphezulu kakhulu, iya kubangela iingxaki ezinjengobunzima ekuphuhliseni, ifilimu enqabileyo, kunye neglue eseleyo. Okubaluleke ngakumbi kukuba ukuvezwa okungalunganga kuya kubangela ukutenxa kobubanzi bomgca wesithombe. Ukuvezwa okugqithisileyo kuya kubhitya imigca yepateni yokucwenga kwaye yenze imigca yokuprinta kunye ne-etching ibe ngqindilili. Ngokuchasene noko, ukutyhileka okungonelanga kuya kwenza imigca yepateni yokucwenga ibe bhityileyo. Irhabaxa ukwenza imigca eshicilelweyo echwethelweyo ibe bhityileyo.