Kufumurwa kunoreva kuti pasi pekuvhenekerwa kwechiedza che ultraviolet, iyo photoinitiator inotora simba rechiedza uye inoora kuita mahara radicals, uye iwo emahara radicals anobva atanga iyo photopolymerization monomer kuita iyo polymerization uye crosslinking reaction. Exposure inowanzoitwa mune otomatiki kaviri-mativi ekuratidzira muchina. Iye zvino muchina wekuvhenekesa unogona kukamurwa kuita mhepo-yakatonhorera uye mvura-yakanyoroveswa zvinoenderana neinotonhora nzira yemwenje sosi.
Zvinhu Zvinokanganisa Kuratidzwa Kwemifananidzo Hunhu
Pamusoro pekuita kwemufirimu photoresist, zvinhu zvinokanganisa kunaka kwekuratidzwa kwekufungidzira ndiko kusarudzwa kwezviedza zvemwenje, kutonga kwekuratidzwa nguva (exposure amount), uye kunaka kwemahwendefa emifananidzo.
1) Kusarudzwa kwechiedza chechiedza
Chero mhando yefirimu ine yayo yakasarudzika spectral absorption curve, uye chero mhando yechiedza sosi inewo yayo emission spectral curve. Kana iyo main spectral absorption peak yeimwe mhando yefirimu inogona kupindirana kana kunyanya kupindirana nespectral emission main peak yeimwe light source, izvo zviviri zvakanyatsoenderana uye exposure mhedzisiro ndiyo yakanyanya kunaka.
Iyo spectral absorption curve yemumba yakaoma firimu inoratidza kuti spectral absorption dunhu iri 310-440 nm (nanometer). Kubva pakuparadzirwa kwesimba remagetsi akati wandei, zvinogona kuoneka kuti mwenje wepick, high pressure mercury rambi, uye iodine gallium rambi zvine hukuru hwakakura hwemwaranzi kusimba muwavelength renji ye310-440nm, inova yakanakira mwenje sosi. kuratidzwa kwefirimu. Xenon marambi haana kukodzerakusadziviririkayemafirimu akaoma.
Mushure mokunge rudzi rwechiedza chechiedza chakasarudzwa, chiedza chine simba guru chinofanirawo kuonekwa. Nekuda kwekusimba kwechiedza chepamusoro, kugadziriswa kwepamusoro, uye nguva pfupi yekuratidzwa, dhigirii rekupisa kwekupisa kweplate yemifananidzo zvakare idiki. Mukuwedzera, kugadzirwa kwemarambi kunokoshawo zvikuru. Izvo zvinodikanwa kuyedza kuita kuti chiitiko chireruke yunifomu uye parallel, kuitira kudzivirira kana kuderedza iyo yakaipa mhedzisiro mushure mekuratidzwa.
2) Kudzora kwekuratidzwa nguva (kuratidzwa huwandu)
Munguva yekuratidzira, iyo photopolymerization yefirimu haisi "imwe-pfuti" kana "imwe-kuratidzwa", asi kazhinji inopfuura nematanho matatu.
Pamusana pekuvhara kweokisijeni kana zvimwe zvinokuvadza zvinosvibisa mu membrane, induction process inodiwa, umo mazamu emahara anokonzerwa nekuparara kwekutanga anopedzwa neokisijeni uye tsvina, uye polymerization ye monomer ishoma. Zvisinei, kana nguva yekudzidzira yapera, photopolymerization yemonomeri inopfuurira nokukurumidza, uye viscosity yefirimu inowedzera nokukurumidza, inosvika pamwero wekuchinja kamwe kamwe. Iyi ndiyo nhanho yekukurumidza kushandiswa kweiyo photosensitive monomer, uye nhanho iyi inomiririra ruzhinji rwekuratidzwa panguva yekuratidzwa. Chiyero chenguva idiki kwazvo. Kana yakawanda yephotosensitive monomer inopedzwa, inopinda mumonomer depletion zone, uye iyo photopolymerization reaction yakapedzwa panguva ino.
Kudzora kwakaringana kwekuratidzwa nguva chinhu chakakosha pakuwana yakanaka yakaoma firimu inopikisa mifananidzo. Kana kuratidzwa kusina kukwana, nekuda kwekusakwana kwepolymerization yemamonomers, panguva yekuvandudza, firimu rinonamatira rinoputika uye rinova rakapfava, mitsetse haina kujeka, ruvara rwakasvibira, uye kunyange degummed, uye firimu rinoputika panguva yekutanga. -plating kana electroplating process. , kudonha, kana kutodonha. Kana kuratidzwa kwakanyanyisa, kunokonzeresa matambudziko sekunetseka mukukura, brittle firimu, uye yakasara glue. Chinonyanya kukosha ndechekuti kuratidzwa zvisirizvo kunokonzeresa kutsauka kwehupamhi hwemutsara wemufananidzo. Kunyanya kuratidzwa kunozotetepa mitsetse yepateni plating uye kuita kuti mitsetse yekudhinda uye etching iwedzere. Pane zvinopesana, kusakwana kuratidzwa kuchaita kuti mitsetse yepatani yeplating ive mitete. Yakakora kuita kuti mitsetse yakadhindwa iite mitete.