Kev raug txhais tau hais tias nyob rau hauv lub irradiation ntawm ultraviolet lub teeb, lub photoinitiator absorbs lub teeb lub zog thiab decomposes mus rau hauv dawb radicals, thiab cov dawb radicals ces pib lub photopolymerization monomer mus nqa tawm lub polymerization thiab crosslinking cov tshuaj tiv thaiv. Kev raug mob feem ntau yog ua nyob rau hauv ib lub tshuab tsis siv neeg kis ob sab. Tam sim no lub tshuab raug tuaj yeem muab faib ua cua txias thiab dej txias raws li txoj kev txias ntawm lub teeb ci.
Cov yam ntxwv cuam tshuam rau cov duab zoo
Ntxiv nrog rau qhov ua tau zoo ntawm cov yeeb yaj kiab photoresist, cov yam ntxwv uas cuam tshuam rau qhov zoo ntawm cov duab raug pom yog kev xaiv ntawm lub teeb pom kev zoo, kev tswj lub sij hawm raug (cov nqi raug), thiab qhov zoo ntawm daim phiaj duab.
1) Kev xaiv lub teeb ci
Txhua hom zaj duab xis muaj nws tus kheej tshwj xeeb spectral absorption nkhaus, thiab txhua yam ntawm lub teeb ci kuj muaj nws tus kheej emission spectral nkhaus. Yog hais tias lub ntsiab spectral absorption ncov ntawm ib yam ntawm cov zaj duab xis muaj peev xwm sib tshooj los yog feem ntau sib tshooj nrog lub spectral emission lub ntsiab ncov ntawm ib tug tej lub teeb qhov chaw, ob yog zoo matched thiab raug cov nyhuv yog qhov zoo tshaj plaws.
Lub spectral absorption nkhaus ntawm domestic qhuav zaj duab xis qhia tau hais tias lub spectral absorption cheeb tsam yog 310-440 nm (nanometer). Los ntawm lub zog spectral faib ntawm ntau qhov chaw teeb pom kev zoo, nws tuaj yeem pom tau tias lub teeb lub teeb, lub teeb kub siab mercury, thiab iodine gallium teeb muaj qhov sib txawv loj ntawm cov hluav taws xob siv nyob rau hauv lub wavelength ntau ntawm 310-440nm, uas yog lub teeb pom kev zoo rau zaj duab xis raug. xenon teeb tsis haum raunphavntawm cov yeeb yaj kiab qhuav.
Tom qab xaiv hom teeb pom kev zoo, lub teeb ci nrog lub zog siab yuav tsum tau txiav txim siab. Vim yog lub teeb ci siab, kev daws teeb meem siab, thiab lub sij hawm raug luv luv, qhov degree ntawm thermal deformation ntawm daim duab phaj tseem me me. Tsis tas li ntawd, kev tsim cov teeb pom kev zoo kuj tseem ceeb heev. Nws yog ib qho tsim nyog yuav tsum tau sim ua kom qhov teeb meem teeb pom kev zoo sib xws thiab sib luag, txhawm rau zam lossis txo qhov tsis zoo tom qab raug.
2) Tswj lub sij hawm raug (tshwj xeeb npaum li cas)
Thaum lub sij hawm raug tus txheej txheem, photopolymerization ntawm zaj duab xis tsis yog "ib-shot" los yog "ib-exposure", tab sis feem ntau mus txog peb theem.
Vim muaj kev cuam tshuam ntawm cov pa oxygen lossis lwm yam tsis zoo hauv daim nyias nyias, yuav tsum muaj txheej txheem induction, uas cov dawb radicals tsim los ntawm decomposition ntawm tus thawj coj tau noj los ntawm oxygen thiab impurities, thiab polymerization ntawm monomer yog tsawg. Txawm li cas los xij, thaum lub sij hawm induction dhau lawm, photopolymerization ntawm lub monomer nce sai, thiab cov viscosity ntawm zaj duab xis nce sai heev, nce mus rau theem ntawm kev hloov tam sim ntawd. Qhov no yog theem ntawm kev noj sai ntawm cov photosensitive monomer, thiab cov theem no suav rau feem ntau ntawm kev raug thaum lub sij hawm raug. Lub sijhawm ntsuas me me heev. Thaum feem ntau ntawm cov photosensitive monomer tau noj, nws nkag mus rau thaj chaw monomer depletion, thiab cov tshuaj tiv thaiv photopolymerization tau ua tiav rau lub sijhawm no.
Kev tswj kom raug lub sij hawm raug yog ib qho tseem ceeb heev kom tau txais cov yeeb yaj kiab zoo qhuav tiv thaiv cov duab. Thaum qhov raug tsis txaus, vim tsis tiav polymerization ntawm cov monomers, thaum lub sij hawm txoj kev loj hlob, cov nplaum zaj duab xis swells thiab ua mos, cov kab tsis meej, xim yog dull, thiab txawm degummed, thiab zaj duab xis warps thaum lub sij hawm ua ntej. -plating lossis electroplating txheej txheem. , seepage, los yog txawm poob. Thaum qhov raug mob siab dhau lawm, nws yuav ua rau muaj teeb meem xws li kev txhim kho nyuaj, nkig zaj duab xis, thiab cov kua nplaum seem. Dab tsi yog qhov hnyav dua yog tias qhov raug tsis raug yuav ua rau qhov sib txawv ntawm cov duab kab dav. Kev cuam tshuam ntau dhau yuav ua rau cov kab ntawm cov qauv plating thiab ua rau cov kab luam ntawv thiab etching thicker. Ntawm qhov tsis sib xws, qhov raug tsis txaus yuav ua rau cov kab ntawm cov qauv plating ua thinner. Coarse kom cov luam ntawv etched kab thinner.